Low-level copper concentration measurements in silicon wafers using trace-element accelerator mass spectrometry
نویسندگان
چکیده
منابع مشابه
Detection and characterization of trace element contamination on silicon wafers
Increasing the speed and complexity of semiconductor integrated circuits requires advanced processes that put extreme constraints on the level of metal contamination allowed on the surfaces of silicon wafers. Such contamination degrades the performance of the ultrathin SiO2 gate dielectrics that form the heart of the individual transistors. Ultimately, reliability and yield are reduced to level...
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Radioactive isotopes of iodine are themost common radiological toxins from nuclear accidents due to their high release and high enrichment in human thyroid. Among the radioactive isotopes, long-lived I can not only be used for the estimation of the radioactive risk of short-lived radioactive isotopes of iodine to humans and ecosystems, but also for the investigation of the biogeochemical cycle ...
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 1998
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.121523